Tfx Errorcode
[03527] The head / plot command is not supported

Service Information This error code indicates the head / plot command is not supported by the exposure head.

Operator Action Verify the previous monitor command and enter a supported head / plot command.

Causes
  • The head / plot command is not supported.

Related Documents ERRORCODE: [03500] The head / plot command is invalid

Applies to: TFX
Modified: Fri May 28 15:59:54 2004
Updated: Thu Jul 17 02:31:28 2008
Module: SYS