Tfx Errorcode
[03550] A safety loop fault is preventing normal operation

Service Information A safety loop fault has been detected and is preventing normal operation of the exposure head.

For example, the diodes will not turn on, focus cannot be learned, z-stage calibration cannot be performed, etc.

Operator Action Call service.

Causes
  • A safety loop fault has been detected.

Related Documents COMMAND: sys fault [<point> (on|off)]

Applies to: TFX
Modified: Fri May 28 15:59:54 2004
Updated: Thu Jul 17 02:31:29 2008
Module: SYS