| Description | A variable used to calibrate the focus error in microns. | |
| Type | Real | |
| Default Value | 100.0000 lsb/um | |
| Range | 30.0000 to 250.0000 lsb/um | |
| Tfx Parameter |
| (requires ENG access) |
| foc errorcal |
| Description | A variable used to calibrate the focus error in microns. | |
| Type | Real | |
| Default Value | 100.0000 lsb/um | |
| Range | 30.0000 to 250.0000 lsb/um | |
| Applies to: | TFX THERMAL2 |
| Access: | ENG |
| Modified: | Wed Aug 29 10:40:59 2007 |
| Updated: | Thu Jul 17 02:31:32 2008 |
| Module: | FOC |