| Description | A coeficient of the force control focus actuator state estimator used in the position control of the final objective lens. This parameter is automatically generated and should NOT be manually adjusted. | |
| Type | Real | |
| Default Value | 0.0000 | |
| Range | -10.0000 to 10.0000 | |
| Related Documents |
PARAMETER: foc fck1 | |
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PARAMETER: foc fck2 | ||
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PARAMETER: foc fcki | ||
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PARAMETER: foc fca1 | ||
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PARAMETER: foc fca3 | ||
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PARAMETER: foc fca4 | ||