| Description | Integral gain setting of the force control state variable feedback system used in the position control of the final objective lens. This parameter is automatically generated and should NOT be manually adjusted. | |
| Type | Real | |
| Default Value | 0.0000 | |
| Range | -10.0000 to 10.0000 | |
| Related Documents |
PARAMETER: foc fck1 | |
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PARAMETER: foc fck2 | ||
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PARAMETER: foc fca1 | ||
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PARAMETER: foc fca2 | ||
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PARAMETER: foc fca3 | ||
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PARAMETER: foc fca4 | ||