Thermal 3 Errorcode: [06414] The beam-balance has been aborted


Service Information	The monitor command bbs mode (initiate\|query\|abort) and the monitor command bbs balance perform an identical beam-balance. However the monitor command bbs mode (initiate\|query\|abort) performs a non-blocking beam-balance while the monitor command bbs balance performs a blocking beam-balance. The non-blocking beam-balance is intended to allow the host to perform a beam-balance while executing other functionality ( i.e. initializing the focus ).
	This error indicates that the non-blocking beam-balance was aborted.
Operator Action	None.
Causes	The non-blocking beam-balance was aborted.
Related Documents	COMMAND: bbs mode (initiate\|query\|abort)