Error Message: |
ALE: Dvac generator unable to maintain the vacuum level. Switch to Dvac pump. |
Applies to: |
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Operator Action: |
This error is only a warning. The plot should be able to finish. |
Service Information: |
This error is only a warning. The machine should be able to use the vacuum pump to continue operation. However, if this error is ignored for a long time, the vacuum pump's operational life may be shortened. If this error recurs frequently, check to see if dvac generator is functional by the monitor command "dvac generator on|off". |
Cause:
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See Also: |
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Go to CTP Firmware Error Index Page
Go to CTP Firmware Error Search Page