| Service Information | A focus driver temperature fault has been detected. The focus driver temperature must be within 10.0 to 65.0 degrees Celsius. | |
| As a result of the fatal fault, the system fault handler will shutdown the exposure head. Note that this error code is also returned to the host as an unsolicited fatal fault. | ||
| Operator Action | Call service. | |
| Causes |
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| Related Documents |
COMMAND: sys fault [<point> (on|off)] | |
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ERRORCODE: [03563] All faults have been cleared | ||