Thermal 2 Errorcode: [03559] The +40V is out-of-range

Thermal2 Errorcode: [03559] The +40V is out-of-range

Thermal2 Errorcode


Service Information	A +40 volt fault has been detected. The +40 volt supply must be within +38.00 to +42.00 volts ( 5% ).
	As a result of the fatal fault, the system fault handler will shutdown the exposure head. Note that this error code is also returned to the host as an unsolicited fatal fault.
Operator Action	Call service.
Causes	A +40 volt fault has been detected.
Related Documents	COMMAND: sys fault [<point> (on\|off)]
	ERRORCODE: [03563] All faults have been cleared